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A zeolite membrane and polymer membranes were prepared for the enrichment of NF3 waste gas. NF3 is a strong greenhouse gas with a 100 year global warming potential (GWP) of > 16,600, and is mostly used in the plasma enhanced chemical vapor deposition (PECVD) process as an etching and cleaning gas. First, dense polymer films using polysulfone, polyimide, AF-1600 (R), AF-2400 (R), PDMS (polymethylsiloxane), PTMSP (poly (1-trimethylsilyl-1-propyne)), and PTMSDPA (poly[1-phenyl-24p-(trimethylsilyl)phenyl]acetylene]) were prepared, and their N-2/NF3 separation performance was studied. High N-2/NF3 ideal selectivity was obtained from the polyimide and polysulfone films, but these modules were not attractive for the NF(3 )enrichment process because of their low N-2/NF3 mixture gas selectivity. SAPO-34 membranes were then prepared and applied for the NF3 enrichment process. This membrane exhibited promising separation performance (> 200 N-2/NF(3 )selectivity, > 6.7 x 10(-8 )N(2 )mol/m(2)/s/Pa) for the NF3 enrichment process. However, in order to deal with a high waste stream volume, it was necessary to greatly increase the membrane area. Potential zeolite membrane frameworks for NF3 enrichment have been proposed through membrane-based system design.