Quaternary geochronology is a fundamental part for Quaternary studies. High resolution and high precision U-Th-Pb dating techniques are increasingly being used and have obtained revolutionary achievements in the study of climate-environment evolution, global change, volcanism-magmatism, and the biota migration-extinction studies. In this paper we introduce the principles, analytical techniques, as well as error correction of secondary ion mass spectrometry (SIMS) in situ U-Th-Pb dating method on Quaternary zircon and review a selection of applications. Compared to bulk dating methods, SIMS in situ dating provides micrometre-scale age information of the samples. For zircons>350ka, conventional SIMS U-Pb dating method with proper common Pb and ~(230)Th correction can be used to accurately determine the age of the samples. For zircons <350ka, U-series (~(238)U-~(230)Th) dates become more precise than ~(238)U-~(206)Pb dates. According to Th-U concentration of the samples, one can chose between SIMS high spatial resolution in situ dating or chemical purification of ~(230)Th before SIMS dating. In the past 10 years, SIMS U-Th-Pb dating technology has made considerable progress and showing great prospect in deciphering mineral crystallization mechanism,magmatic processes and volcanic activities. Three laboratories in China have been equipped with large, high resolution and high sensitivity SIMS. It is important to establish SIMS U-Th zircon dating techniques for Quaternary rocks to promote the study and application of high resolution Quaternary geochronology as well as Quaternary geology in our country.