U-Th/He method has been widely applied to geological study. Especially the apatite U-Th/He chronometry is sensitive to late Cenozoic structure deformation, and to the geomorphic evolution drove by river incision and glacial erosion because of the low closure temperature of Helium. Therefore the apatite U-Th/He is more suitable than other isotopic chronometry for near surface process of crust. Here we will firstly review the meandering evolution history of U-Th/He method, then introduce the principle, analysis method, alpha-correction and the facing problems of U-Th/He method, following summarize the four aspects of application of U-Th/He on Cenozoic deformation, on river geomorphic evolution, on climate change and on source tracing, finally look into the future of the method. The fundamentals of the U-Th/He dating are similar to U-Th/Pb dating method, and the difference between these two methods is the radioactive decay daughter. The decay daughter of U-Th/He method is helium, however the decay daughter of the U-Th/Pb is lead. Commonly the dilution method is used to analysize the uranium, Thorium and helium content and then calculate the age of mineral grain. The uncertainty of U-Th/He age by dilution method usually is 5 ~10 percent. The large uncertainty generally attribute to four factors, i.e. long alpha-stopping distance effect, unhomogeneous uranium and thorium distribution, helium implanting and helium closure temperature changing resulted from the radioactive damage. Therefore the boring grain-picking has been asked to make sure the mineral grain quality is good enough. In site helium dating by excimer laser is one potential mothed to overcome long alpha-stopping distance effect and reduce grain-picking work. However larger uncertainty (15 percent or more) of the in site dating method impede the widely application of the helium dating method. The helium has now been applied to a range of tectonic, geologic,geomorphologic,weathering,rive incision, erosion and source tracing problem. Four kinds of application of U-Th/He was presented to illustrate using U-Th/He age. The first one is dating the onset time of northern Qilian Shan exhumation drove by the Tibetan Plateau outgrowth; the second one is dating the evolution of Colorado River Big Canyon; the third one is dating the goethite and studying the climate of Axel Heiberg Island; the last one is tracing the sediment source by U-Th/He and U-Th/Pb double dating. The future of the U-Th/he method was looked forward. Three potential researching aspects were proposed. The three aspects include improving analysis precision, U-Th/He and U-Th/Pb double dating and modeling the geomorphic evolution by combining the U-Th/He age, digital elevation model (DEM) and deformation data.